Digiquartz® Pressure Sensor Technology

Paroscientific manufactures and sells a complete line of inherently-digital, high precision pressure instrumentation. Resolution of better than 0.0001% and typical accuracy of 0.01% are achieved even under difficult environmental conditions. Other desirable characteristics include low power consumption, high reliability, and excellent long-term stability. Over 30 full scale pressure ranges are available - from a fraction of an atmosphere to thousands of atmospheres (3 psid to 40,000 psia).

The remarkable performance is achieved through the use of a precision quartz crystal resonator whose frequency of oscillation varies with pressure induced stress. Quartz crystals were chosen for the sensing elements because of their remarkable repeatability, low hysteresis, and excellent stability. The resonant frequency outputs are maintained and detected with oscillator electronics similar to those used in precision clocks and counters.

Several flexurally-vibrating, single or dual beam, load-sensitive resonators have been developed. The Double-Ended Tuning Fork consists of two identical beams driven piezoelectrically in 180° phase opposition such that very little energy is transmitted to the mounting pads. The high Q resonant frequency, like that of a violin string, is a function of the applied load; increasing with tension and decreasing with compressive forces. The digital temperature sensor consists of piezoelectrically-driven, torsionally oscillating tines whose resonant frequency is a function of temperature. Its output is used to thermally compensate the calculated pressure and achieve high accuracy over a wide range of temperatures.

Load and Temperature Sensitive Resonators

 

Bellows and Bourdon tube mechanisms

Pressure transducer mechanisms employ bellows or Bourdon tubes as the pressure-to-load generators. Pressure acts on the effective area of the bellows to generate a force and torque about the pivot and compressively stress the resonator. The change in frequency of the quartz crystal oscillator is a measure of the applied pressure. Similarly, pressure applied to the Bourdon tube generates an uncoiling force which applies tension to the quartz crystal to increase its resonant frequency. Temperature sensitive crystals are used for thermal compensation. The mechanisms are acceleration compensated with balance weights to reduce the effects of shock and vibration. The transducers are hermetically sealed and evacuated to eliminate air damping and maximize the Q of the resonators. The internal vacuum also serves as an excellent reference for the absolute pressure transducer configurations.

Microprocessor-based intelligent electronics are available with counter-timer circuitry to measure transducer frequency or period outputs, storage of the linearization and thermal compensation algorithm, calibration coefficients, and command and control software to process the outputs in a variety of digital formats.

©2007 Paroscientific, Inc.